Kase, M., Kikuchi, Y., Kubo, T., Niwa, H., & Fukuda, T. (1999). Issues of ultra shallow junction formation using sub-1 keV ion implantation. 1998 International Conference on Ion Implantation Technology. Proceedings (Cat. No.98EX144), Ion Implantation Technology Proceedings, 1998 International Conference on, Ion implantation technology, 1, 110-113. https://doi.org/10.1109/IIT.1999.812064

Kase, M., Y. Kikuchi, T. Kubo, H. Niwa, and T. Fukuda. "Issues of Ultra Shallow Junction Formation Using Sub-1 KeV Ion Implantation." 1998 International Conference on Ion Implantation Technology. Proceedings (Cat. No.98EX144), Ion Implantation Technology Proceedings, 1998 International Conference on, Ion Implantation Technology 1 (1999): 110-113. https://doi.org/10.1109/IIT.1999.812064.

Kase, M., et al. "Issues of Ultra Shallow Junction Formation Using Sub-1 KeV Ion Implantation." 1998 International Conference on Ion Implantation Technology. Proceedings (Cat. No.98EX144), Ion Implantation Technology Proceedings, 1998 International Conference on, Ion Implantation Technology, vol. 1, 1999, pp. 110-113, https://doi.org/10.1109/IIT.1999.812064.