Bibliographic Details
| Title: |
Issues of ultra shallow junction formation using sub-1 keV ion implantation |
| Authors: |
Kase, M., Kikuchi, Y., Kubo, T., Niwa, H., Fukuda, T. |
| Source: |
1998 International Conference on Ion Implantation Technology. Proceedings (Cat. No.98EX144) Ion implantation technology Ion Implantation Technology Proceedings, 1998 International Conference on. 1:110-113 vol.1 1999 |
| Relation: |
1998 International Conference on Ion Implantation Technology. Proceedings. Ion Implantation Technology - 98 |
| Database: |
IEEE Xplore Digital Library |
