| Title: |
Mechanical simulations of BOX creep for strained FDSOI |
| Authors: |
Berthelon, R., Andrieu, F., Mathieu, B., Dutartre, D., Le Royer, C., Vinet, M., Claverie, A. |
| Source: |
2017 Joint International EUROSOI Workshop and International Conference on Ultimate Integration on Silicon (EUROSOI-ULIS) Ultimate Integration on Silicon (EUROSOI-ULIS), 2017 Joint International EUROSOI Workshop and International Conference on. :91-94 Apr, 2017 |
| Relation: |
2017 Joint International EUROSOI Workshop and International Conference on Ultimate Integration on Silicon (EUROSOI-ULIS) |
| Database: |
IEEE Xplore Digital Library |
