Forming a more robust sidewall spacer with lower k (dielectric constant) value
| Title: | Forming a more robust sidewall spacer with lower k (dielectric constant) value |
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| Authors: | Tao Han, Man Gu, Grunow, Stephan, Huang Liu, Sankaran, Sujatha, Jinping Liu |
| Source: | 2017 China Semiconductor Technology International Conference (CSTIC) Semiconductor Technology International Conference (CSTIC), 2017 China. :1-3 Mar, 2017 |
| Relation: | 2017 China Semiconductor Technology International Conference (CSTIC) |
| Database: | IEEE Xplore Digital Library |
| ISBN: | 9781509066940 |
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| DOI: | 10.1109/CSTIC.2017.7919797 |
| Published in: | 2017 China Semiconductor Technology International Conference (CSTIC), Semiconductor Technology International Conference (CSTIC), 2017 China |