Annealing Behavior of Aluminum Implanted Germanium
| Title: | Annealing Behavior of Aluminum Implanted Germanium |
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| Authors: | Onoda, Hiroshi, Nakashima, Yoshiki, Nagayama, Tsutomu, Sakai, Shigeki, Joshi, Abhijeet, Zaima, Shigeaki |
| Source: | 2016 21st International Conference on Ion Implantation Technology (IIT) Ion Implantation Technology (IIT), 2016 21st International Conference on. :1-4 Sep, 2016 |
| Relation: | 2016 21st International Conference on Ion Implantation Technology (IIT) |
| Database: | IEEE Xplore Digital Library |
| ISBN: | 9781509020249 |
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| DOI: | 10.1109/IIT.2016.7882849 |
| Published in: | 2016 21st International Conference on Ion Implantation Technology (IIT), Ion Implantation Technology (IIT), 2016 21st International Conference on |