Bibliographic Details
| Title: |
Electron power absorption dynamics and ion energy distributions in capacitive discharges driven by customized voltage waveforms in argon and CF4 |
| Authors: |
Berger, Birk, Brandt, Steven, Franek, James, Schuengel, Edmund, Koepke, Mark, Schulze, Julian, Mussenbrock, Thomas, Bruneau, Bastien, Johnson, Erik, Lafleur, Trevor, Booth, Jean-Paul, O'Connell, Deborah, Gans, Timo, Korolov, Ihor, Derzsi, Aranka, Donko, Zoltan |
| Source: |
2016 IEEE International Conference on Plasma Science (ICOPS) Plasma Science (ICOPS), 2016 IEEE International Conference on. :1-1 Jun, 2016 |
| Relation: |
2016 IEEE International Conference on Plasma Science (ICOPS) |
| Database: |
IEEE Xplore Digital Library |
