Near Vacuum Gas Damping in MEMS: Numerical Modeling and Experimental Validation
| Title: | Near Vacuum Gas Damping in MEMS: Numerical Modeling and Experimental Validation |
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| Authors: | Frangi, A., Fedeli, P., Laghi, G., Langfelder, G., Gattere, G. |
| Source: | Journal of Microelectromechanical Systems J. Microelectromech. Syst. Microelectromechanical Systems, Journal of. 25(5):890-899 Oct, 2016 |
| Database: | IEEE Xplore Digital Library |
| ISSN: | 10577157 19410158 |
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| DOI: | 10.1109/JMEMS.2016.2584699 |
| Published in: | Journal of Microelectromechanical Systems, Microelectromechanical Systems, Journal of, J. Microelectromech. Syst. |