High temperature ion implanter for SiC and Si devices
| Title: | High temperature ion implanter for SiC and Si devices |
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| Authors: | Takahashi, Naoya, Itoi, Suguru, Nakashima, Yoshiki, Zhao, WeiJiang, Onoda, Hiroshi, Sakai, Shigeki |
| Source: | 2015 15th International Workshop on Junction Technology (IWJT) Junction Technology (IWJT), 2015 15th International Workshop on. :6-7 Jun, 2015 |
| Relation: | 2015 15th International Workshop on Junction Technology (IWJT) |
| Database: | IEEE Xplore Digital Library |
| ISBN: | 9784863485174 |
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| DOI: | 10.1109/IWJT.2015.7467062 |
| Published in: | 2015 15th International Workshop on Junction Technology (IWJT), Junction Technology (IWJT), 2015 15th International Workshop on |