The strength of BEOL structures fabricated using low K materials and its impact on CPI failures
| Title: | The strength of BEOL structures fabricated using low K materials and its impact on CPI failures |
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| Authors: | Shaw, T.M., Liu, X-H, Misra, E., Questad, D., Bonilla, G., Wassick, T., Lamorey, M., Shobha, H., Osborne, G., Kioussis, D., Wright, J., Bisson, R., Paquin, I., Bouchard, S.S., Tetreault, S., Stone, D., Muzzy, C., Sundlof, B., Daubenspeck, T. |
| Source: | 2015 IEEE International Integrated Reliability Workshop (IIRW) Integrated Reliability Workshop (IIRW), 2015 IEEE International. :115-118 Oct, 2015 |
| Relation: | 2015 IEEE International Integrated Reliability Workshop (IIRW) |
| Database: | IEEE Xplore Digital Library |
| ISBN: | 9781467373951 9781467373944 9781467373968 |
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| ISSN: | 23748036 |
| DOI: | 10.1109/IIRW.2015.7437081 |
| Published in: | 2015 IEEE International Integrated Reliability Workshop (IIRW), Integrated Reliability Workshop (IIRW), 2015 IEEE International |