MEMS, MOEMS, RF-MEMS and photonics packaging based on LTCC technology

Bibliographic Details
Title: MEMS, MOEMS, RF-MEMS and photonics packaging based on LTCC technology
Authors: Karioja, Pentti, Kautio, Kari, Ollila, Jyrki, Keranen, Kimmo, Karppinen, Mikko, Heikkinen, Veli, Jaakola, Tuomo, Lahti, Markku
Source: Proceedings of the 5th Electronics System-integration Technology Conference (ESTC) Electronics System-Integration Technology Conference (ESTC), 2014. :1-6 Sep, 2014
Relation: 2014 Electronics System-Integration Technology Conference (ESTC)
Database: IEEE Xplore Digital Library