Highly piezoelectric co-doped AlN thin films for wideband FBAR applications
| Title: | Highly piezoelectric co-doped AlN thin films for wideband FBAR applications |
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| Authors: | Yokoyama, Tsuyoshi, Iwazaki, Yoshiki, Onda, Yousuke, Sasajima, Yuichi, Nishihara, Tokihiro, Ueda, Masanori |
| Source: | 2014 IEEE International Ultrasonics Symposium Ultrasonics Symposium (IUS), 2014 IEEE International. :281-288 Sep, 2014 |
| Relation: | 2014 IEEE International Ultrasonics Symposium (IUS) |
| Database: | IEEE Xplore Digital Library |
| ISBN: | 9781479970490 9781479970483 |
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| ISSN: | 10510117 |
| DOI: | 10.1109/ULTSYM.2014.0070 |
| Published in: | 2014 IEEE International Ultrasonics Symposium, Ultrasonics Symposium (IUS), 2014 IEEE International |