Fabrication and characterization of polysilicon for DNA detection
| Title: | Fabrication and characterization of polysilicon for DNA detection |
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| Authors: | Ang, Y. M., Arshad, M. K. Md., Foo, K. L., Nuzaihan, Md. N. M., Azman, A. H., Hashim, U. |
| Source: | 2014 IEEE International Conference on Semiconductor Electronics (ICSE2014) Semiconductor Electronics (ICSE), 2014 IEEE International Conference on. :404-407 Aug, 2014 |
| Relation: | 2014 IEEE 11th International Conference on Semiconductor Electronics (ICSE) |
| Database: | IEEE Xplore Digital Library |
| ISBN: | 9781479957606 |
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| DOI: | 10.1109/SMELEC.2014.6920883 |
| Published in: | 2014 IEEE International Conference on Semiconductor Electronics (ICSE2014), Semiconductor Electronics (ICSE), 2014 IEEE International Conference on |