The RF power effect on the surface morphology of titanium dioxide (TiO2) film

Bibliographic Details
Title: The RF power effect on the surface morphology of titanium dioxide (TiO2) film
Authors: Norhafiezah, S., Ayub, R. M., Arshad, M. K. Md, Azman, A.H., Fatin, M. F., Farehanim, M.A., Hashim, U.
Source: 2014 IEEE International Conference on Semiconductor Electronics (ICSE2014) Semiconductor Electronics (ICSE), 2014 IEEE International Conference on. :48-51 Aug, 2014
Relation: 2014 IEEE 11th International Conference on Semiconductor Electronics (ICSE)
Database: IEEE Xplore Digital Library