Test structures for MCM-D technology characterization

Bibliographic Details
Title: Test structures for MCM-D technology characterization
Authors: Lozano, M., Santander, J., Cabruja, E., Perello, C., Ullan, M., Lora-Tamayo, E.
Source: ICMTS 1998. Proceedings of 1998 International Conference on Microelectronic Test Structures (Cat. No.98CH36157) Microelectronic test structures Microelectronic Test Structures, 1998. ICMTS 1998., Proceedings of the 1998 International Conference on. :183-188 1998
Relation: ICMTS 1998. Proceedings of 1998 International Conference on Microelectronic Test Structures
Database: IEEE Xplore Digital Library