Two-axis MEMS scanning mirror driven by a single PZT actuator
| Title: | Two-axis MEMS scanning mirror driven by a single PZT actuator |
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| Authors: | Chen, Chung-De, Wang, Yu-Jen, Yeh, Chien-Hsien |
| Source: | 2014 IEEE/ASME International Conference on Advanced Intelligent Mechatronics Advanced Intelligent Mechatronics (AIM), 2014 IEEE/ASME International Conference on. :1261-1266 Jul, 2014 |
| Relation: | 2014 IEEE/ASME International Conference on Advanced Intelligent Mechatronics (AIM) |
| Database: | IEEE Xplore Digital Library |
| ISBN: | 9781479957361 9781479957354 |
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| ISSN: | 21596247 21596255 |
| DOI: | 10.1109/AIM.2014.6878255 |
| Published in: | 2014 IEEE/ASME International Conference on Advanced Intelligent Mechatronics, Advanced Intelligent Mechatronics (AIM), 2014 IEEE/ASME International Conference on |