Expanding role of predictive TCAD in advanced technology development
| Title: | Expanding role of predictive TCAD in advanced technology development |
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| Authors: | Wu, Jeff, Diaz, C. H. |
| Source: | 2013 International Conference on Simulation of Semiconductor Processes and Devices (SISPAD) Simulation of Semiconductor Processes and Devices (SISPAD), 2013 International Conference on. :167-171 Sep, 2013 |
| Relation: | 2013 International Conference on Simulation of Semiconductor Processes and Devices (SISPAD) |
| Database: | IEEE Xplore Digital Library |
| ISBN: | 9781467357333 9781467357364 |
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| ISSN: | 19461569 19461577 |
| DOI: | 10.1109/SISPAD.2013.6650601 |
| Published in: | 2013 International Conference on Simulation of Semiconductor Processes and Devices (SISPAD), Simulation of Semiconductor Processes and Devices (SISPAD), 2013 International Conference on |