Modeling of MOVPE GaAs Growth Assuming Thermodynamic Equilibrium at The Growth Front: (C/sub 2/H/sub 5/)/sub 2/GaCl and AsH/sub 3/
| Title: | Modeling of MOVPE GaAs Growth Assuming Thermodynamic Equilibrium at The Growth Front: (C/sub 2/H/sub 5/)/sub 2/GaCl and AsH/sub 3/ |
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| Authors: | Hierlemann, M., Kuech, T.F. |
| Source: | Sixth International Conference Metalorganic Vapor Phase Epitaxy Metalorganic Vapor Phase Epitaxy, 1992. Sixth International Conference. :112-113 1992 |
| Relation: | Sixth International Conference Metalorganic Vapor Phase Epitaxy |
| Database: | IEEE Xplore Digital Library |
| ISBN: | 0879426527 9780879426521 |
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| DOI: | 10.1109/MOVPE.1992.664967 |
| Published in: | Sixth International Conference Metalorganic Vapor Phase Epitaxy, Metalorganic Vapor Phase Epitaxy, 1992. Sixth International Conference |