Damage control with cluster ion implantation
| Title: | Damage control with cluster ion implantation |
|---|---|
| Authors: | Sakai, Shigeki, Hamamoto, Nariaki, Nakashima, Yoshiki, Onoda, Hiroshi |
| Source: | 2013 13th International Workshop on Junction Technology (IWJT) Junction Technology (IWJT), 2013 13th International Workshop on. :26-29 Jun, 2013 |
| Relation: | 2013 13th International Workshop on Junction Technology (IWJT) |
| Database: | IEEE Xplore Digital Library |
| ISBN: | 9781479905782 9781479905799 9781479905805 |
|---|---|
| DOI: | 10.1109/IWJT.2013.6644497 |
| Published in: | 2013 13th International Workshop on Junction Technology (IWJT), Junction Technology (IWJT), 2013 13th International Workshop on |