Post Copper CMP Hybrid Clean Process for Advanced BEOL Technology

Bibliographic Details
Title:	Post Copper CMP Hybrid Clean Process for Advanced BEOL Technology
Authors:	Tseng, W.-T., Devarapalli, V., Steffes, J., Ticknor, A., Khojasteh, M., Poloju, P., Goyette, C., Steber, D., Tai, L., Molis, S., Zaitz, M., Rill, E., Kennett, M., Economikos, L., Lustig, N., Bunke, C., Truong, C., Chudzik, M., Grunow, S.
Source:	IEEE Transactions on Semiconductor Manufacturing IEEE Trans. Semicond. Manufact. Semiconductor Manufacturing, IEEE Transactions on. 26(4):493-499 Nov, 2013
Database:	IEEE Xplore Digital Library

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RecordInfo	BibRecord: BibEntity: Identifiers: – Type: doi Value: 10.1109/TSM.2013.2273124 PhysicalDescription: Pagination: PageCount: 7 StartPage: 493 Titles: – TitleFull: Post Copper CMP Hybrid Clean Process for Advanced BEOL Technology Type: main BibRelationships: HasContributorRelationships: – PersonEntity: Name: NameFull: Tseng, W.-T. – PersonEntity: Name: NameFull: Devarapalli, V. – PersonEntity: Name: NameFull: Steffes, J. – PersonEntity: Name: NameFull: Ticknor, A. – PersonEntity: Name: NameFull: Khojasteh, M. – PersonEntity: Name: NameFull: Poloju, P. – PersonEntity: Name: NameFull: Goyette, C. – PersonEntity: Name: NameFull: Steber, D. – PersonEntity: Name: NameFull: Tai, L. – PersonEntity: Name: NameFull: Molis, S. – PersonEntity: Name: NameFull: Zaitz, M. – PersonEntity: Name: NameFull: Rill, E. – PersonEntity: Name: NameFull: Kennett, M. – PersonEntity: Name: NameFull: Economikos, L. – PersonEntity: Name: NameFull: Lustig, N. – PersonEntity: Name: NameFull: Bunke, C. – PersonEntity: Name: NameFull: Truong, C. – PersonEntity: Name: NameFull: Chudzik, M. – PersonEntity: Name: NameFull: Grunow, S. IsPartOfRelationships: – BibEntity: Dates: – D: 01 M: 11 Type: published Y: 2013 Identifiers: – Type: issn-print Value: 08946507 – Type: issn-print Value: 15582345 – Type: issn-locals Value: edseee.IEEEJournals Numbering: – Type: volume Value: 26 – Type: issue Value: 4 Titles: – TitleFull: IEEE Transactions on Semiconductor Manufacturing, Semiconductor Manufacturing, IEEE Transactions on, IEEE Trans. Semicond. Manufact. Type: main
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