A novel inverse-magnetostrictive type pressure sensor with planar sensing inductor
| Title: | A novel inverse-magnetostrictive type pressure sensor with planar sensing inductor |
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| Authors: | Chang, H.-C., Liao, S.-C., Hsieh, H.-S., Lin, S.-J., Lai, C.-H., Chen, R., Fang, W. |
| Source: | 2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS) Micro Electro Mechanical Systems (MEMS), 2013 IEEE 26th International Conference on. :685-688 Jan, 2013 |
| Relation: | 2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS) |
| Database: | IEEE Xplore Digital Library |
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