A novel inverse-magnetostrictive type pressure sensor with planar sensing inductor

Bibliographic Details
Title: A novel inverse-magnetostrictive type pressure sensor with planar sensing inductor
Authors: Chang, H.-C., Liao, S.-C., Hsieh, H.-S., Lin, S.-J., Lai, C.-H., Chen, R., Fang, W.
Source: 2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS) Micro Electro Mechanical Systems (MEMS), 2013 IEEE 26th International Conference on. :685-688 Jan, 2013
Relation: 2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS)
Database: IEEE Xplore Digital Library