Bibliographic Details
Title: |
A novel inverse-magnetostrictive type pressure sensor with planar sensing inductor |
Authors: |
Chang, H.-C., Liao, S.-C., Hsieh, H.-S., Lin, S.-J., Lai, C.-H., Chen, R., Fang, W. |
Source: |
2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS) Micro Electro Mechanical Systems (MEMS), 2013 IEEE 26th International Conference on. :685-688 Jan, 2013 |
Relation: |
2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS) |
Database: |
IEEE Xplore Digital Library |