Implant approaches and challenges for 20nm node and beyond ETSOI devices
| Title: | Implant approaches and challenges for 20nm node and beyond ETSOI devices |
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| Authors: | Ponoth, S., Vinet, M., Grenouillet, L., Kumar, A., Kulkarni, P., Liu, Q., Cheng, K., Haran, B., Posseme, N., Khakifirooz, A., Loubet, N., Mehta, S., Kuss, J., Destefanis, V., Berliner, N., Sreenivasan, R., Le Tiec, Y., Kanakasabapathy, S., Schmitz, S., Levin, T., Luning, S., Hook, T., Khare, M., Shahidi, G., Doris, B. |
| Source: | IEEE 2011 International SOI Conference SOI Conference (SOI), 2011 IEEE International. :1-2 Oct, 2011 |
| Relation: | 2011 IEEE International SOI Conference |
| Database: | IEEE Xplore Digital Library |
| ISBN: | 9781612847597 9781612847610 9781612847603 |
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| ISSN: | 1078621X |
| DOI: | 10.1109/SOI.2011.6081679 |
| Published in: | IEEE 2011 International SOI Conference, SOI Conference (SOI), 2011 IEEE International |