Effects of laser drilling through silicon substrate on MOSFET device characteristics
| Title: | Effects of laser drilling through silicon substrate on MOSFET device characteristics |
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| Authors: | Youngkyu Song, Chulhyun Park, Junghan Kang, Ik-Bu Sohn, Young-Chul Noh, Jongmin Lee, Eung Jang Lee, Seung-Han Park, Soogil Lee, Jongill Hong, Ilgu Yun |
| Source: | 2010 3rd International Nanoelectronics Conference (INEC) Nanoelectronics Conference (INEC), 2010 3rd International. :1167-1168 Jan, 2010 |
| Relation: | 2010 IEEE 3rd International Nanoelectronics Conference (INEC) |
| Database: | IEEE Xplore Digital Library |
| ISBN: | 9781424435432 9781424435449 |
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| ISSN: | 21593523 21593531 |
| DOI: | 10.1109/INEC.2010.5424968 |
| Published in: | 2010 3rd International Nanoelectronics Conference (INEC), Nanoelectronics Conference (INEC), 2010 3rd International |