Extremely thin SOI (ETSOI) CMOS with record low variability for low power system-on-chip applications
| Title: | Extremely thin SOI (ETSOI) CMOS with record low variability for low power system-on-chip applications |
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| Authors: | Cheng, K., Khakifirooz, A., Kulkarni, P., Ponoth, S., Kuss, J., Shahrjerdi, D., Edge, L. F., Kimball, A., Kanakasabapathy, S., Xiu, K., Schmitz, S., Reznicek, A., Adam, T., He, H., Loubet, N., Holmes, S., Mehta, S., Yang, D., Upham, A., Seo, S.-C., Herman, J. L., Johnson, R., Zhu, Y., Jamison, P., Haran, B. S., Zhu, Z., Vanamurth, L. H., Fan, S., Horak, D., Bu, H., Oldiges, P. J., Sadana, D. K., Kozlowski, P., McHerron, D., O'Neill, J., Doris, B. |
| Source: | 2009 IEEE International Electron Devices Meeting (IEDM) Electron Devices Meeting (IEDM), 2009 IEEE International. :1-4 Dec, 2009 |
| Relation: | 2009 IEEE International Electron Devices Meeting (IEDM) |
| Database: | IEEE Xplore Digital Library |
| ISBN: | 9781424456406 9781424456390 9781424456413 |
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| ISSN: | 01631918 2156017X |
| DOI: | 10.1109/IEDM.2009.5424422 |
| Published in: | 2009 IEEE International Electron Devices Meeting (IEDM), Electron Devices Meeting (IEDM), 2009 IEEE International |