CMOS compatible Ge/Si core/shell nanowire gate-all-around pMOSFET integrated with HfO2/TaN gate stack
| Title: | CMOS compatible Ge/Si core/shell nanowire gate-all-around pMOSFET integrated with HfO2/TaN gate stack |
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| Authors: | Peng, J. W., Singh, N., Lo, G. Q., Kwong, D.L., Lee, S. J. |
| Source: | 2009 IEEE International Electron Devices Meeting (IEDM) Electron Devices Meeting (IEDM), 2009 IEEE International. :1-4 Dec, 2009 |
| Relation: | 2009 IEEE International Electron Devices Meeting (IEDM) |
| Database: | IEEE Xplore Digital Library |
| ISBN: | 9781424456406 9781424456390 9781424456413 |
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| ISSN: | 01631918 2156017X |
| DOI: | 10.1109/IEDM.2009.5424284 |
| Published in: | 2009 IEEE International Electron Devices Meeting (IEDM), Electron Devices Meeting (IEDM), 2009 IEEE International |