Bibliographic Details
| Title: |
Universal surfaces for the accurate contact resistivity extraction on Kelvin structures with upper and lower resistive layers |
| Authors: |
Santander, J., Lozano, M., Gotz, A., Cane, C., Lora-Tamayo, E. |
| Source: |
Proceedings of International Conference on Microelectronic Test Structures Microelectronic test structures Microelectronic Test Structures, 1996. ICMTS 1996. Proceedings. 1996 IEEE International Conference on. :67-74 1996 |
| Relation: |
Proceedings of International Conference on Microelectronic Test Structures |
| Database: |
IEEE Xplore Digital Library |
