APA (7th ed.) Citation

Chen, F., Lloyd, J. R., Chanda, K., Achanta, R., Bravo, O., Strong, A., . . . He, Z. (2008). Line edge roughness and spacing effect on low-k TDDB characteristics. 2008 IEEE International Reliability Physics Symposium, Reliability Physics Symposium, 2008. IRPS 2008. IEEE International, 132. https://doi.org/10.1109/RELPHY.2008.4558874

Chicago Style (17th ed.) Citation

Chen, F., et al. "Line Edge Roughness and Spacing Effect on Low-k TDDB Characteristics." 2008 IEEE International Reliability Physics Symposium, Reliability Physics Symposium, 2008. IRPS 2008. IEEE International 2008: 132. https://doi.org/10.1109/RELPHY.2008.4558874.

MLA (8th ed.) Citation

Chen, F., et al. "Line Edge Roughness and Spacing Effect on Low-k TDDB Characteristics." 2008 IEEE International Reliability Physics Symposium, Reliability Physics Symposium, 2008. IRPS 2008. IEEE International, 2008, p. 132, https://doi.org/10.1109/RELPHY.2008.4558874.

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