Line edge roughness and spacing effect on low-k TDDB characteristics
| Title: | Line edge roughness and spacing effect on low-k TDDB characteristics |
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| Authors: | Chen, F., Lloyd, J. R., Chanda, K., Achanta, R., Bravo, O., Strong, A., McLaughlin, P. S., Shinosky, M., Sankaran, S., Gebreselasie, E., Stamper, A. K., He, Z.X. |
| Source: | 2008 IEEE International Reliability Physics Symposium Reliability Physics Symposium, 2008. IRPS 2008. IEEE International. :132-137 Apr, 2008 |
| Relation: | 2008 IEEE International Reliability Physics Symposium (IRPS) |
| Database: | IEEE Xplore Digital Library |
| ISBN: | 9781424420490 9781424420506 |
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| ISSN: | 15417026 19381891 |
| DOI: | 10.1109/RELPHY.2008.4558874 |
| Published in: | 2008 IEEE International Reliability Physics Symposium, Reliability Physics Symposium, 2008. IRPS 2008. IEEE International |