Pelzer, B., Michel, W., Lengeling, G., Strauch, G., Schmitz, D., & Jurgensen, H. (1993). Reactor design and improvement of uniformity in InP based OMVPE. 1993 (5th) International Conference on Indium Phosphide and Related Materials, Indium Phosphide and Related Materials, 1993. Conference Proceedings., Fifth International Conference on, Indium phosphide and related materials, 139-142. https://doi.org/10.1109/ICIPRM.1993.380690
Chicago Style (17th ed.) CitationPelzer, B., W. Michel, G. Lengeling, G. Strauch, D. Schmitz, and H. Jurgensen. "Reactor Design and Improvement of Uniformity in InP Based OMVPE." 1993 (5th) International Conference on Indium Phosphide and Related Materials, Indium Phosphide and Related Materials, 1993. Conference Proceedings., Fifth International Conference on, Indium Phosphide and Related Materials 1993: 139-142. https://doi.org/10.1109/ICIPRM.1993.380690.
MLA (8th ed.) CitationPelzer, B., et al. "Reactor Design and Improvement of Uniformity in InP Based OMVPE." 1993 (5th) International Conference on Indium Phosphide and Related Materials, Indium Phosphide and Related Materials, 1993. Conference Proceedings., Fifth International Conference on, Indium Phosphide and Related Materials, 1993, pp. 139-142, https://doi.org/10.1109/ICIPRM.1993.380690.
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