Bibliographic Details
| Title: |
Reactor design and improvement of uniformity in InP based OMVPE |
| Authors: |
Pelzer, B., Michel, W., Lengeling, G., Strauch, G., Schmitz, D., Jurgensen, H. |
| Source: |
1993 (5th) International Conference on Indium Phosphide and Related Materials Indium phosphide and related materials Indium Phosphide and Related Materials, 1993. Conference Proceedings., Fifth International Conference on. :139-142 1993 |
| Relation: |
1993 (5th) International Conference on Indium Phosphide and Related Materials |
| Database: |
IEEE Xplore Digital Library |
