Characterization of industrial p-type CZ silicon wafers passivated with a-SiC/sub x/:H films
| Title: | Characterization of industrial p-type CZ silicon wafers passivated with a-SiC/sub x/:H films |
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| Authors: | Vetter, M., Touati, Y., Martin, I., Ferre, R., Alcubilla, R., Torres, I., Alonso, J., Vazquez, M.A. |
| Source: | Conference on Electron Devices, 2005 Spanish Electron devices Electron Devices, 2005 Spanish Conference on. :247-250 2005 |
| Relation: | 2005 Spanish Conference on Electron Devices. Proceedings |
| Database: | IEEE Xplore Digital Library |
| ISBN: | 0780388100 9780780388109 |
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| ISSN: | 21634971 |
| DOI: | 10.1109/SCED.2005.1504370 |
| Published in: | Conference on Electron Devices, 2005 Spanish, Electron Devices, 2005 Spanish Conference on, Electron devices |