Bibliographic Details
| Title: |
Channel cracking in low-k films on patterned multi-layers |
| Authors: |
Liu, X.H., Shaw, T.M., Lane, M.W., Rosenberg, R.R., Lane, S.L., Doyle, J.P., Restaino, D., Vogt, S.F., Edelstaeing, D.C. |
| Source: |
Proceedings of the IEEE 2004 International Interconnect Technology Conference (IEEE Cat. No.04TH8729) Interconnect technology Interconnect Technology Conference, 2004. Proceedings of the IEEE 2004 International. :93-95 2004 |
| Relation: |
Proceedings of the IEEE 2004 International Interconnect Technology Conference |
| Database: |
IEEE Xplore Digital Library |
