Investigation of hot carrier effects in n-MISFETs with HfSiON gate dielectric
| Title: | Investigation of hot carrier effects in n-MISFETs with HfSiON gate dielectric |
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| Authors: | Takayanagi, M., Watanabe, T., Iijima, R., Ishimaru, K., Tsunashima, Y. |
| Source: | 2004 IEEE International Reliability Physics Symposium. Proceedings Reliability physics Reliability Physics Symposium Proceedings, 2004. 42nd Annual. 2004 IEEE International. :13-17 2004 |
| Relation: | 2004 IEEE International Reliability Physics Symposium. Proceedings |
| Database: | IEEE Xplore Digital Library |
| ISBN: | 078038315X 9780780383159 |
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| DOI: | 10.1109/RELPHY.2004.1315294 |
| Published in: | 2004 IEEE International Reliability Physics Symposium. Proceedings, Reliability Physics Symposium Proceedings, 2004. 42nd Annual. 2004 IEEE International, Reliability physics |