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Improving the Performance of MEMS Resonant Sensors with Synchronized Piezoresistive/Capacitive Transductions using Signal Fusion

Bibliographic Details
Title: Improving the Performance of MEMS Resonant Sensors with Synchronized Piezoresistive/Capacitive Transductions using Signal Fusion
Authors: Li, Chengxin, Wu, Fan, Zhao, Chun, Zhang, Hemin, Torunbalci, Mustafa Mert, Wang, Chen, De Strycker, Lieven, Kraft, Michael
Source: 2025 IEEE 38th International Conference on Micro Electro Mechanical Systems (MEMS) Micro Electro Mechanical Systems (MEMS), 2025 IEEE 38th International Conference on. :946-949 Jan, 2025
Relation: 2025 IEEE 38th International Conference on Micro Electro Mechanical Systems (MEMS)
Database: IEEE Xplore Digital Library
More Details
ISBN:9798331508890
ISSN:21601968
DOI:10.1109/MEMS61431.2025.10918189
Published in:2025 IEEE 38th International Conference on Micro Electro Mechanical Systems (MEMS), Micro Electro Mechanical Systems (MEMS), 2025 IEEE 38th International Conference on