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A Novel Mems Resonant Pressure Sensor Operating in Air with Thermal Actuation and Piezoresistive Sensing

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Title: A Novel Mems Resonant Pressure Sensor Operating in Air with Thermal Actuation and Piezoresistive Sensing
Authors: Wang, Chen, van der Wiel, Appo, Maes, Ben, Gidts, Michiel, Kraft, Michael
Source: 2025 IEEE 38th International Conference on Micro Electro Mechanical Systems (MEMS) Micro Electro Mechanical Systems (MEMS), 2025 IEEE 38th International Conference on. :877-880 Jan, 2025
Relation: 2025 IEEE 38th International Conference on Micro Electro Mechanical Systems (MEMS)
Database: IEEE Xplore Digital Library
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  Data: A Novel Mems Resonant Pressure Sensor Operating in Air with Thermal Actuation and Piezoresistive Sensing
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  Data: 2025 IEEE 38th International Conference on Micro Electro Mechanical Systems (MEMS) Micro Electro Mechanical Systems (MEMS), 2025 IEEE 38th International Conference on. :877-880 Jan, 2025
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  Data: 2025 IEEE 38th International Conference on Micro Electro Mechanical Systems (MEMS)
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        Value: 10.1109/MEMS61431.2025.10917584
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            NameFull: Wang, Chen
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            NameFull: Maes, Ben
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            NameFull: Gidts, Michiel
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              Type: published
              Y: 2025
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