Bibliographic Details
| Title: |
A Novel Mems Resonant Pressure Sensor Operating in Air with Thermal Actuation and Piezoresistive Sensing |
| Authors: |
Wang, Chen, van der Wiel, Appo, Maes, Ben, Gidts, Michiel, Kraft, Michael |
| Source: |
2025 IEEE 38th International Conference on Micro Electro Mechanical Systems (MEMS) Micro Electro Mechanical Systems (MEMS), 2025 IEEE 38th International Conference on. :877-880 Jan, 2025 |
| Relation: |
2025 IEEE 38th International Conference on Micro Electro Mechanical Systems (MEMS) |
| Database: |
IEEE Xplore Digital Library |
