Mechanism of Improving Al₂O₃/β-Ga₂O₃ Interface After Supercritical Fluid Process at a Low Temperature
| Title: | Mechanism of Improving Al₂O₃/β-Ga₂O₃ Interface After Supercritical Fluid Process at a Low Temperature |
|---|---|
| Authors: | Wen, Z., Yang, M., Yang, S., Li, S., Li, M., Zhou, L., Geng, L., Hao, Y. |
| Source: | IEEE Transactions on Electron Devices IEEE Trans. Electron Devices Electron Devices, IEEE Transactions on. 72(4):1669-1673 Apr, 2025 |
| Database: | IEEE Xplore Digital Library |
| ISSN: | 00189383 15579646 |
|---|---|
| DOI: | 10.1109/TED.2025.3544174 |
| Published in: | IEEE Transactions on Electron Devices, Electron Devices, IEEE Transactions on, IEEE Trans. Electron Devices |