Bibliographic Details
| Title: |
Design and Analysis of Piezoelectric Atomizing Nozzle for Photoresist Coating |
| Authors: |
Luo, Yi, Chen, Jian, Guo, Jin, Zhang, Bing, Hu, Hong, Huang, Jinren, Fan, Xu |
| Source: |
2024 18th Symposium on Piezoelectricity, Acoustic Waves, and Device Applications (SPAWDA) Piezoelectricity, Acoustic Waves, and Device Applications (SPAWDA), 2024 18th Symposium on. :177-181 Nov, 2024 |
| Relation: |
2024 18th Symposium on Piezoelectricity, Acoustic Waves, and Device Applications (SPAWDA) |
| Database: |
IEEE Xplore Digital Library |
