Multiscale Modeling of Self-Heating-Induced and Deformation-Accelerated Dielectric Traps Impacting Critical Path of Dielectric Breakdown in 5-nm Stacked Nanosheet FET
Title: | Multiscale Modeling of Self-Heating-Induced and Deformation-Accelerated Dielectric Traps Impacting Critical Path of Dielectric Breakdown in 5-nm Stacked Nanosheet FET |
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Authors: | Kumar, V., Kumar Sharma, D., Dasgupta, S., Datta, A. |
Source: | IEEE Transactions on Electron Devices IEEE Trans. Electron Devices Electron Devices, IEEE Transactions on. 72(3):1293-1300 Mar, 2025 |
Database: | IEEE Xplore Digital Library |
ISSN: | 00189383 15579646 |
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DOI: | 10.1109/TED.2025.3535680 |
Published in: | IEEE Transactions on Electron Devices, Electron Devices, IEEE Transactions on, IEEE Trans. Electron Devices |