Fabrication and Characterization of Low-Size and Compact AlN PMUT Arrays for Advanced Ultrasonic Applications
| Title: | Fabrication and Characterization of Low-Size and Compact AlN PMUT Arrays for Advanced Ultrasonic Applications |
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| Authors: | de Fazio, R., Mastronardi, V.M., Candida, P., Qualtieri, A., Rizzi, F., Boni, E., Tortoli, P., Visconti, P., Vittorio, M.d. |
| Source: | IEEE Sensors Journal IEEE Sensors J. Sensors Journal, IEEE. 25(5):8032-8042 Mar, 2025 |
| Database: | IEEE Xplore Digital Library |
| ISSN: | 1530437X 15581748 23799153 |
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| DOI: | 10.1109/JSEN.2025.3527754 |
| Published in: | IEEE Sensors Journal, Sensors Journal, IEEE, IEEE Sensors J. |