Bibliographic Details
| Title: |
In Situ Localization Techniques of Defects in Advanced Semiconductor Devices from Macro-Scale to Atomistic-Scale |
| Authors: |
Huang, Jialu, Zhou, Jingming, Dong, Zuoyuan, Wang, Runsheng, Chu, Junhao, Wu, Xing |
| Source: |
2024 IEEE 17th International Conference on Solid-State & Integrated Circuit Technology (ICSICT) Solid-State & Integrated Circuit Technology (ICSICT), 2024 IEEE 17th International Conference on. :1-5 Oct, 2024 |
| Relation: |
2024 IEEE 17th International Conference on Solid-State & Integrated Circuit Technology (ICSICT) |
| Database: |
IEEE Xplore Digital Library |
