Mature Defect-Free Micro Processing for Advanced IC Substrates

Bibliographic Details
Title: Mature Defect-Free Micro Processing for Advanced IC Substrates
Authors: Anspach, Nils, Ostholt, Roman, Noack, Richard, Santos, Rafael
Source: 2024 19th International Microsystems, Packaging, Assembly and Circuits Technology Conference (IMPACT) Microsystems, Packaging, Assembly and Circuits Technology Conference (IMPACT), 2024 19th International. :115-118 Oct, 2024
Relation: 2024 19th International Microsystems, Packaging, Assembly and Circuits Technology Conference (IMPACT)
Database: IEEE Xplore Digital Library