Bibliographic Details
| Title: |
Towards Unparallelled CMOS-compatible Air-coupled pMUT Performance with 30% Sc-doped AlN through an Analysis of Residual Stress Effects |
| Authors: |
Liu, Jihang, Jian, Goh Duan, Ssu-Han Chen, Daniel, Sze Wai, David Choong, Shyam, Trivedi, Ramegowda, Prakasha Chigahalli, Srinivas, Merugu, Huamao, Lin, Xin, Zhang Qing, Chang Hyun Kee, Peter, Das, Amal, Sciarrone, Alessandra, Leotti, Alberto, Giusti, Domenico, Lee, Joshua E.-Y., Koh, Yul |
| Source: |
2024 IEEE Ultrasonics, Ferroelectrics, and Frequency Control Joint Symposium (UFFC-JS) Ultrasonics, Ferroelectrics, and Frequency Control Joint Symposium (UFFC-JS), 2024 IEEE. :1-4 Sep, 2024 |
| Relation: |
2024 IEEE Ultrasonics, Ferroelectrics, and Frequency Control Joint Symposium (UFFC-JS) |
| Database: |
IEEE Xplore Digital Library |
