Study on Supercritical Fluid Technique for Application in Nonvolatile Resistive Random Access Memory (RRAM) Device Using SBT Ferroelectric Thin Films

Bibliographic Details
Title: Study on Supercritical Fluid Technique for Application in Nonvolatile Resistive Random Access Memory (RRAM) Device Using SBT Ferroelectric Thin Films
Authors: Chen, Kai-Huang, Kao, Ming-Cheng, Cheng, Chien-Min, Wang, Yao-Chin, Hsieh, Cheng-Che, Hung, Guo-Jau
Source: 2024 IEEE Ultrasonics, Ferroelectrics, and Frequency Control Joint Symposium (UFFC-JS) Ultrasonics, Ferroelectrics, and Frequency Control Joint Symposium (UFFC-JS), 2024 IEEE. :1-3 Sep, 2024
Relation: 2024 IEEE Ultrasonics, Ferroelectrics, and Frequency Control Joint Symposium (UFFC-JS)
Database: IEEE Xplore Digital Library