Bibliographic Details
| Title: |
Self-aligned 8nm T2T as cell boundary in the middle-of-line |
| Authors: |
Marien, P., Hermans, Y., Choudhury, S., Kundu, S., Decoster, S., Okudur, F.U., Reddy, N., Kenens, B., Jourdan, N., Delie, G., Marti, G., Wu, C., Gonzalez, V. V., Murdoch, G., Park, S., Tokei, Z. |
| Source: |
2024 IEEE International Interconnect Technology Conference (IITC) Interconnect Technology Conference (IITC), 2024 IEEE International. :1-3 Jun, 2024 |
| Relation: |
2024 IEEE International Interconnect Technology Conference (IITC) |
| Database: |
IEEE Xplore Digital Library |
