Super-Resolution Three-Dimensional Topography Measurement Using Microsphere-Aided Broadband Light Interferometry
| Title: | Super-Resolution Three-Dimensional Topography Measurement Using Microsphere-Aided Broadband Light Interferometry |
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| Authors: | Deng, K., Liu, Y., Yang, F., Huang, J., Wen, L. |
| Source: | IEEE Access Access, IEEE. 12:183658-183664 2024 |
| Database: | IEEE Xplore Digital Library |
| ISSN: | 21693536 |
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| DOI: | 10.1109/ACCESS.2024.3470554 |
| Published in: | IEEE Access, Access, IEEE |