Streamlining Critical Queue Timer Management: A Digital Twin Approach to Optimize Frontend Manufacturing
| Title: | Streamlining Critical Queue Timer Management: A Digital Twin Approach to Optimize Frontend Manufacturing |
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| Authors: | Hajo, Terbrack, Holger, Brandl, Philipp, Rossbach |
| Source: | 2024 35th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) SEMI Advanced Semiconductor Manufacturing Conference (ASMC), 2024 35th Annual. :01-06 May, 2024 |
| Relation: | 2024 35th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) |
| Database: | IEEE Xplore Digital Library |
| ISBN: | 9798350384550 |
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| ISSN: | 23766697 |
| DOI: | 10.1109/ASMC61125.2024.10545464 |
| Published in: | 2024 35th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC), SEMI Advanced Semiconductor Manufacturing Conference (ASMC), 2024 35th Annual |