Experimental demonstration and modeling of a ferroelectric gate stack with a tunnel dielectric insert for NAND applications

Bibliographic Details
Title: Experimental demonstration and modeling of a ferroelectric gate stack with a tunnel dielectric insert for NAND applications
Authors: Das, Dipjyoti, Park, Hyeonwoo, Wang, Zekai, Zhang, Chengyang, Ravindran, Prasanna Venkatesan, Park, Chinsung, Afroze, Nashrah, Hsu, Po-Kai, Tian, Mengkun, Chen, Hang, Chern, Winston, Lim, Suhwan, Kim, Kwangsoo, Kim, Kijoon, Kim, Wanki, Ha, Daewon, Yu, Shimeng, Datta, Suman, Khan, Asif
Source: 2023 International Electron Devices Meeting (IEDM) Electron Devices Meeting (IEDM), 2023 International. :1-4 Dec, 2023
Relation: 2023 International Electron Devices Meeting (IEDM)
Database: IEEE Xplore Digital Library
More Details
ISBN:9798350327670
ISSN:2156017X
DOI:10.1109/IEDM45741.2023.10413697
Published in:2023 International Electron Devices Meeting (IEDM), Electron Devices Meeting (IEDM), 2023 International