| Title: |
In-situ etching of InP and related P materials in MOVPE chamber using PCl/sub 3/ |
| Authors: |
Ougazzaden, A., Peticolas, L., Rader, M., Chu, S.N.G. |
| Source: |
Conference Proceedings. 14th Indium Phosphide and Related Materials Conference (Cat. No.02CH37307) Indium phosphide and related materials Indium Phosphide and Related Materials Conference, 2002. IPRM. 14th. :327-330 2002 |
| Relation: |
Proceedings of 14th Indium Phosphide and Related Materials Conference (IPRM) |
| Database: |
IEEE Xplore Digital Library |
