Bibliographic Details
| Title: |
Improvement of Electrical Properties of Metal- Insulator Interface Based on Ar/HMDSO μ-APPJ |
| Authors: |
Guan, Xiuhan, Xiong, Wanyue, Wang, Liyan, Zhu, Xi, Fang, Zhi |
| Source: |
2023 IEEE 4th International Conference on Electrical Materials and Power Equipment (ICEMPE) Electrical Materials and Power Equipment (ICEMPE), 2023 IEEE 4th International Conference on. :1-4 May, 2023 |
| Relation: |
2023 IEEE 4th International Conference on Electrical Materials and Power Equipment (ICEMPE) |
| Database: |
IEEE Xplore Digital Library |
